Brooks mass flow controller manual






















The Brooks models S Smart Mass Flow Controllers, S and S Smart Mass Flow Meters can be used for up to bar high pressure applications. The full scale flow limits @ bar operation pressure of the model S Smart Mass Flow Controller are from mln/min f.s. to 10 ln/min f.s. (Nitrogen gas equivalent). Brooks Instrument Datasheets for Flow Controllers. Flow controllers monitor and maintain flow-rate variables, typically in process applications. Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. manual is an installation and operation manual for your instrument. Thank you for purchasing a Brooks Instrument mass flow device. This If you have purchased a Brooks ® Digital Mass Flow Product with RS, DeviceNet ®, Profibus,EtherCAT ® or EtherNet IP TM communicatons, a separate supplemental manual is also available as part of the operating.


The Vögtlin product line-up covers thermal mass flow meters and mass flow controllers for gases and the first long-life integrated battery mass flow meter with built-in touch display. Our high-precision devices come equipped with digital and analog interface, IP67/NEMA6 protection and ATEX certification. these systems is the thermal mass flow sensor, which produces an electrical output signal as a function of flow rate. In addition, models S, S and S Brooks Smart Mass Flow Controllers control gas flows. The flow ranges per model are listed in Table Table Flow ranges per model min. f.s. max. f.s. Unit *. manual is an installation and operation manual for your instrument. Thank you for purchasing a Brooks Instrument mass flow device. This If you have purchased a Brooks ® Digital Mass Flow Product with RS, DeviceNet ®, Profibus,EtherCAT ® or EtherNet IP TM communicatons, a separate supplemental manual is also available as part of the operating.


Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more. Brooks® Mf Series Smart Mass Flow Meters and Controllers • Provides mass flow measurement and control of gases from 3 ml n /min. full scale to more than m3 n /h. (max. l n /min control). • Robust and compact. • Weatherproof IP 65 and NEMA 4X protection. • Certified for CE and zone 2 hazardous environment. The Brooks Model i Mass Flow Controller is used where manual, electronic or computer controlled gas handling occurs. The Model i consists of three basic units: a flow sensor, a control valve and an integral electronic control system. This combination produces a stable gas flow, which eliminates the need to continuously monitor and re-adjust gas.

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